During the July-September period, the company beat profit expectations of T$72.9 billion from 21 analysts polled by Thomson Reuters.
TSMC had reported net profit of T$59.7 billion in the second quarter and T$52 billion in the same three months of 2013.
Shares of TSMC ended flat ahead of the earnings release, versus a 0.25 percent fall in the broader TAIEX index.